Important dates
| PTB Seminar VUV and EUV Metrology: | October 24-25, 2013 |
| Early registration deadline: | September 22, 2013 |
| Registration deadline: | October 21, 2013 |
| no onsite registration possible | |
| Poster abstract submission deadline: | extended to October 7, 2013 |
| Authors notified: | October 9, 2013 |
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