273. PTB-Seminar
VUV and EUV Metrology
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Preliminary Program
The seminar will take place in the lecture hall at
BESSY II, Albert-Einstein-Str. 15, 12489 Berlin.
Thursday, October 24
th
9:00
Reception opens
10:00
Opening
10:10
G. Ulm
Synchrotron radiation-based metrology at PTB
PTB
10:30
H. Enkisch
Overview of EUV Lithography at Carl Zeiss SMT
Zeiss
10:50
N. Bowering
EUV light sources for device development and manufacturing
Cymer
11:10
T. Feigl
Coatings and refurbishment of EUV collector mirrors
optiX fab
11:30
Coffee
12:00
F. Scholze
The new EUV Ellipsometer of PTB
PTB
12:20
F. Schäfers
Ellipsometry, polarimetry and reflectometry at BESSY-II
HZB BESSY
12:40
K. Tiedtke
Challenges for detection of highly intense, ultra-short pulsed VUV/EUV radiation: Photon beam diagnostics at FLASH
DESY
13:00
Lunch
14:00
N. Esser
Spectroscopic Ellipsometry in the UV-VUV spectral range: Instrumentation and Applications
ISAS
14:20
G. Roeder
Thin film analytics with VUV reflectometry
IISB
14:40
P. Törmä
Ultra-thin rigid X-ray windows and filters for soft X-rays
HSfoils
15:00
L. Juschkin
EUV spectroscopic reflectometry for thin surface layer characterization
RWTH
15:20
R. Lebert
XUV-Lab-Systems: Achieving precision and accuracies approaching PTB with XUV-Spectrophotometers
Bruker
15:40
K. Mann
Laser Driven EUV/Soft X-ray Source and Wavefront Measurements at Short Wavelengths
LLG
16:00
Lab tour &
Posters
18:00
Get Together Meeting
Friday, October 25
th
8:30
L. Nanver
PureB/PureGaB photodiodes for CMOS-compatible VUV detectors and imagers
TU Delft
8:50
A. Knigge
Development of AlGaN MSM photodetectors
FBH
9:10
S. Nihtianov
VUV/DUV performance of pureB-photodiodes
TU Delft
9:30
G. Meynants
Backside illuminated CMOS active pixel sensor technology for EUV and NUV wavelength ranges
CMOSIS nv
9:50
Coffee /
Posters
10:20
R. Vest
calibration of VUV space-based measurement systems
NIST
10:40
A. BenMoussa
Developments, characterization and proton irradiation damage tests of AlN photodetectors for VUV Solar Observations
ROB
11:00
A. Jones
VUV calibration of solar spectral irradiance instruments at SURF: A users experience
LASP U Colorado
11:20
U. Schühle
Design and space qualification of a VUV telescope mirror for solar observations
MPS
11:40
L. Werner
Instabilities of the Spectral Responsivity of Photodiodes in the UV
PTB
12:00
Lunch
12:50
I. Makhotkin
Routine and expert analysis of multilayer mirrors
FOM
13:10
A. Haase
Diffuse EUV scattering from rough multilayers
PTB
13:30
S. Schröder
Angle resolved scattering at 193 nm and 13.5 nm
IOF
13:50
F. Siewert
Achievements and upcoming Challenges on Metrology for Synchrotron optics
HZB BESSY
14:10
Coffee
14:40
S. Bajt
Focusing FEL X-rays with normal incidence optic
DESY
15:00
S. Yulin
Recent development of EUV/X-Ray multilayer optics in IOF
IOF
15:20
S. Braun
Challenges with non-periodic multilayer coatings for EUV and X-ray optics
IWS
15:40
E. Louis
Tuning the optical response of multilayer mirrors
FOM
16:00
Closing